XGT

XGT, High Vacuum Slit Valve

Explore the features, model options and technical documentation for XGT. Contact Pnoneks to select the full part number for your application.

SMC ·High Vacuum Slit Valves

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Selecting XGT

Selecting XGT: review the full part number and your system conditions when considering this High vacuum record. Share Valve Size, Valve Type, Opening Window Size, Gate O-ring Material, Auto Switch and Connector, the required quantity and your application notes with Pnoneks. Final compatibility and lead time are confirmed during quotation.

ABOUT THE PRODUCT

The essentials for selection.

Manufacturer: SMC
Series: XGT
Product group: High vacuum
Function: High Vacuum Slit Valves
Applications: Suitability is evaluated against technical specifications and application conditions.
Selection parameters: Valve Size, Valve Type, Opening Window Size, Gate O-ring Material, Auto Switch and Connector

Exact dimensions, operating ranges and compatibility depend on the full part number. Review the relevant SMC documentation and application conditions for technical selection.

TECHNICAL PRODUCT INFORMATION

Features and model options

Technical descriptions and values below are preserved in the manufacturer’s original language. Options describe alternatives within the series; not every combination is valid. We will verify the full part number when quoting.

Gasket with wiper: protection of bellows
Rubber cushions for opening and closing: impact absorption
End lock mechanism
Service life of two million cycles

Selection fields published in the source
Parameter	Options / values
Valve Size	22 (Two Axes Bellows, Applicable Wafer Size 200 mm) · 31 (One Axis Bellows, Applicable Wafer Size 300 mm)
Valve Type	1 (Non-Cassette Type) · 2 (Cassette Type Standard) · 3 (Cassette Type Half MESK) · 4 (Cassette Type Full MESK)
Opening Window Size	32222 (32 x 222, Applicable Wafer Size 200 mm) · 46236 (46 x 236, Applicable Wafer Size 200 mm) · 50336 (50 x 336, Applicable Wafer Size 300 mm)
Gate O-ring Material	1 (FKM) · 2 (Kalrez® 4079)
Auto Switch and Connector	None · A (2 pcs. D-A93 w/05 M Lead Wire and No Connector) · C (2 pcs. D-A93 w/Multiple Connector) · F (2 pcs. D-A93 w/D-sub Connector)