- At SMC we believe we have ‘sealed it’ with our refined XSA series high vacuum solenoid valve. Normally closed, the XSA offers high sealing with minimum leakage and a minimum operating pressure differential of just 1 x 10-6 Pa (abs). Highly versatile, it has compression and face seal fittings, a Faston terminal and greater choice of voltages. The spring has also been moved to the XSA’s body, reducing contact and minimising particle generation. Corrosion resistant, efficient, economical to operate and lighter in weight, are all new commercial advantages of the XSA that support our focus on developing innovations to drive energy savings and competitive advantages for customers. It is suitable for applications such as gas injection within the process chamber and when working with inert gases for industries such as food, medical, semiconductor, photovoltaic and LCD.
Series image. Appearance may vary by model and options.High vacuum
XSA
XSA, Normally Closed, High Vacuum Solenoid Valve
Explore the features, model options and technical documentation for XSA. Contact Pnoneks to select the full part number for your application.
SMC ·High Vacuum Equipment
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Selecting XSA
Selecting XSA: review the full part number and your system conditions when considering this High vacuum record. Share Model, Orifice Size, Fitting Size, Fitting Type, Rated Voltage, Electrical Entry, Spacer, the required quantity and your application notes with Pnoneks. Final compatibility and lead time are confirmed during quotation.
ABOUT THE PRODUCT
The essentials for selection.
- Manufacturer
- SMC
- Series
- XSA
- Product group
- High vacuum
- Function
- High Vacuum Equipment
- Applications
- Suitability is evaluated against technical specifications and application conditions.
- Selection parameters
- Model, Orifice Size, Fitting Size, Fitting Type, Rated Voltage, Electrical Entry, Spacer
Exact dimensions, operating ranges and compatibility depend on the full part number. Review the relevant SMC documentation and application conditions for technical selection.
TECHNICAL PRODUCT INFORMATION
Features and model options
Technical descriptions and values below are preserved in the manufacturer’s original language. Options describe alternatives within the series; not every combination is valid. We will verify the full part number when quoting.
| Parameter | Options / values |
|---|---|
| Model | 1 (Size 1) · 2 (Size 2) · 3 (Size 3) |
| Orifice Size | 1 (Ø2 mm) · 2 (ø3) · 3 (ø4.5) · 4 (Ø6 mm) |
| Fitting Size | 1 (1/8) · 2 (1/4) · 3 (3/8) |
| Fitting Type | S (Compression Fitting) · V (Face Seal Fitting) · P (Rc Female Thread) · N (NPT Female Thread) |
| Rated Voltage | 1 (100 VAC) · 2 (200 VAC) · 3 (110 VAC) · 4 (220 VAC) · 5 (24 VDC) · 6 (12 VDC) · 7 (240 VAC) · 8 (48 VAC) · B (24 VAC) · J (230 VAC) |
| Electrical Entry | C (Conduit w/Surge Voltage Suppressor) · D (DIN Terminal w/Surge Voltage Suppressor) · DL (DIN Termianl w/Light, w/Surge Voltage Suppressor) · DO (DIN Terminal w/o Connector, w/Surge Voltage Suppressor) · F (Faston Terminal) · G (Grommet) · GS (Grommet w/Surge Voltage Suppressor) · T (Terminal w/Surge Voltage Suppressor) · TL (Terminal w/Light, w/Surge Voltage Suppressor) |
| Spacer | None · A (w/Spacer) |
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