HRZC

Non F-Gas (CO2 Refrigerant) Thermo-chiller for the Semiconductor Industry – HRZC

Explore the features, model options and technical documentation for HRZC. Contact Pnoneks to select the full part number for your application.

SMC ·Semiconductor Chiller - HRZ

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Selecting HRZC

Selecting HRZC: review the full part number and your system conditions when considering this Temperature control record. Share Cooling Capacity, Circulating Fluid, Analogue Communication, DeviceNet® Communication, NPT Fitting, DI Control Kit, Circulating Fluid Automatic Recovery, the required quantity and your application notes with Pnoneks. Final compatibility and lead time are confirmed during quotation.

ABOUT THE PRODUCT

The essentials for selection.

Manufacturer: SMC
Series: HRZC
Product group: Temperature control
Function: Semiconductor Chiller - HRZ
Applications: Suitability is evaluated against technical specifications and application conditions.
Selection parameters: Cooling Capacity, Circulating Fluid, Analogue Communication, DeviceNet® Communication, NPT Fitting, DI Control Kit, Circulating Fluid Automatic Recovery

Exact dimensions, operating ranges and compatibility depend on the full part number. Review the relevant SMC documentation and application conditions for technical selection.

TECHNICAL PRODUCT INFORMATION

Features and model options

Technical descriptions and values below are preserved in the manufacturer’s original language. Options describe alternatives within the series; not every combination is valid. We will verify the full part number when quoting.

Eco-friendly refrigerant, efficient performance

Decrease administration time and costs – CO2 requires no import or usage quotas under the F-Gas Regulation
Simplify transportation – CO2, unlike many traditional refrigerants, is not subject to international air transport restrictions
Use it in the semiconductor industry – Compliant with the SEMI S2, S8, F47
Reduce your costs – Compressor and pump inverter for energy-efficient performance.

More features

Cooling capacity: 2, 4, 8, 10 kW
Temperature stability: ±0.1 ºC
Set temperature range: -20 - 90 ºC
Type of circulating fluid:
Fluorinated fluids
Ethylene glycol aqueous solution
Communication:
Contact input/output signal
Serial RS-485 communication
Analogue communication
DeviceNet communication.

Selection fields published in the source
Parameter	Options / values
Cooling Capacity	002 (2 kW) · 004 (4 kW) · 008 (8 kW) · 010 (10 kW)
Circulating Fluid	Fluorinated Fluids · 1 (60% Ethylene Glycol Aqueous Solution) · 2 (Water)
Analogue Communication	None · C (Analogue Communication)
DeviceNet® Communication	None · D (DeviceNet® Communication)
NPT Fitting	None · N (NPT Fitting)
DI Control Kit	None · Y (DI Control Kit)
Circulating Fluid Automatic Recovery	None · Z (Circulating Fluid Automatic Recovery)

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